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The following are recent presentations by members of the CODP group. They may be downloaded in PDF or Powerpoint format. To download the presentation click on the highlighted text below the title. You can obtain the Acrobat Reader for PDF files from .

  1. S. Rauf and M. J. Kushner, "Numerical Investigation of Feedback Control in Plasma Processing Reactors", 191st Meeting of the Electrochemical Society, Montreal, Quebec, Canada, May 1997. ("Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing", edited by M. Meyyappan, D. J. Economou and S. W. Butler (Electrochemical Society, New Jersey, 1997), p. 245-250)

  2. Ronald L. Kinder and Mark J. Kushner, "Simulations of Ar/O2 Plasmas for Oxide Growth and Interface Treatments ", 50th Gaseous Electronics Conference, Madison, WI, October 1997.

  3. Ronald L. Kinder and Mark J. Kushner, "Simulations of ECR Processing Systems Sustained by Azimuthal Microwave TE(0,N) Modes", 25th IEEE International Conference on Plasma Science, Raleigh, NC, June 1998.

  4. Shahid Rauf and Mark J. Kushner, "The Consequences of Cell Geometry and Gas Mixtures on Plasma Display Panel Performance ", 25th IEEE International Conference on Plasma Science, Raleigh, NC, June 1998.

  5. Shahid Rauf and Mark J. Kushner, "Feedback Control of Polysilicon Etching: Controller Design Issues ", 25th IEEE International Conference on Plasma Science, Raleigh, NC, June 1998.

  6. Shahid Rauf, "Dynamics of Nonlinear Plasma-Circuit Interaction", University of Wisconsin Engineering Research Center for Plasma Aided Manufacturing, September 1998.

  7. Mark J. Kushner, "Modeling and Simulation of Plasma Processing: Status and Database Requirements", CECAM Workshop on Electron-Molecule Collision Data for Modeling and Simulation of Plasma Processing, Lyon, France, September 1998; and at the Department of Energy Electron and Photon Initiated Chemistry Workshop, Berkeley, CA, October 1998.

    Presentation (4.7 MB) | Presentation without photos of plasma tools (2.4 MB) | Photographs of plasma tools (2.1 MB)

  8. Ronald L. Kinder, "Modeling of an ECR Source for Materials Processing", TECHCON '98, Las Vegas, Nevada, September 1998.

  9. Shahid Rauf and Mark J. Kushner, "Optimization of a Plasma Display Panel Cell", 51st Gaseous Electronics Conference, Maui, Hawaii, October 1998.

  10. Xudong "Peter" Xu and Mark J. Kushner, "A Kinetic Model for Excimer UV and VUV Radiation in Dielectric Barrier Discharges", 51st Gaseous Electronics Conference, Maui, Hawaii, October 1998.

  11. Da Zhang and Mark J. Kushner, "Optimization of Plasma Uniformity Using Hollow Cathode Structures in RF Discharges", 51st Gaseous Electronics Conference, Maui, Hawaii, October 1998.

  12. Eric R. Keiter and Mark J. Kushner, "A 3D Hybrid Model of a Helicon Source", 51st Gaseous Electronics Conference, Maui, Hawaii, October 1998. (7.3 MB)

  13. Ronald L. Kinder and Mark J. Kushner, "Consequences of Mode Structure in ECR Sources Used for Materials Processing", 51th Gaseous Electronics Conference, Maui, Hawaii, October 1998.

  14. Shahid Rauf and Mark J. Kushner, "Multifrequency Operation of RIE and ICP Sources", 45th National Symposium of the American Vacuum Society, Baltimore, MD, November 1998.

  15. Xudong "Peter" Xu and Mark J. Kushner, "Scaling of PFC Abatement Using Plasma Burn Boxes", 45th National Symposium of the American Vacuum Society, Baltimore, MD, November 1998.

  16. Junqing Lu and Mark J. Kushner, "Sources of Asymmetry in Ionized Metal PVD Reactors", 45th National Symposium of the American Vacuum Society, Baltimore, MD, November 1998. (9.4 MB)

  17. Da Zhang and Mark J. Kushner, "An Integrated Surface Kinetics-Plasma Equipment Model for Etching", 45th National Symposium of the American Vacuum Society, Baltimore, MD, November 1998.

  18. Robert J. Hoekstra and Mark J. Kushner, "Modeling Finite 3-Dimensional Features in High Plasma Density Etching Tools", 45th National Symposium of the American Vacuum Society, Baltimore, MD, November 1998.

  19. Mark J. Kushner, "Particles in Plasmas: An Update", Sematech Workshop on Particle Control at the 100 nm Node, Austin, TX December 1998.

  20. Junqing Lu and Mark J. Kushner, "Sputter Heating in Ionized Metal Physical Vapor Deposition", 26th IEEE International Conference on Plasma Science (paper 1D05), Monterey, CA, June 1999.

  21. Ronald L. Kinder and Mark J. Kushner, "Simulations of Low Field helicon Discharges Using a Two Dimensional Hybrid Plasma Equipment Model", 26th IEEE International Conference on Plasma Science (paper 1D07), Monterey, CA, June 1999.

  22. Mark J. Kushner, "Plasma Modeling for Design of Equipment, Processes and Real-Time-Control Strategies", AFSOR Computational and Applied Mathematics Program Review, St. Louis, MO, August 1999. (4.6 MB)

  23. Rajesh Dorai and Mark J. Kushner, "Plasma Remediation of NOx from Diesel Exhausts: Effects of Propene and Propane", Ford Research Labs, Dearborn, MI, August 1999. (860 kB)

  24. Tim Pricer, Mark Kushner and Richard Alkire, "Monte Carlo Simulations of the Electrodeposition of Copper", 196th Electrochemical Society Meeting, Honolulu, HI, October 1999. (158 kB)

  25. Ron L. Kinder and Mark J. Kushner, "Modeling of Wave Heated Discharges Used in Plasma Processing Reactors", UCLA Plasma Group Seminar, Los Angeles, CA, September 1999. (2 MB)

  26. Da Zhang and Mark J. Kushner, "Sticking Coefficients of Neutrals in a Radio Frequencey Fluorocarbon Discharge", 52nd Gaseous Electronics Conference, Norfolk, VA, October 1999. (274 kB)

  27. Trudy Van der Straaten and Mark J. Kushner, "A Monte-Carlo Model of Resonant Radiation Transport in a Plasma Display Panel: Transition from Optically Thick to Optically Thin Regimes", 52nd Gaseous Electronics Conference, Norfolk, VA, October 1999. (360 kB)

  28. Gabriel Font and Mark J. Kushner, "Scaling of Hollow Cathode Magnetrons for Metal Deposition", 52nd Gaseous Electronics Conference, Norfolk, VA, October 1999. (772 kB)

  29. Mark J. Kushner, "Strategies for Rapidly Developing Plasma Chemistry Models", 52nd Gaseous Electronics Conference, Norfolk, VA, October 1999. (381 kB)

  30. S. Williams, S. Arnold, A. Viggiano, R. Morris, R. Dorai and M. J. Kushner, "Ion-Molecule Reactions in a Nitrogen-Benzene Plasma: Implications for the Destruction of Aromatic Compounds", 52nd Gaseous Electronics Conference, Norfolk, VA, October 1999. (680 kB)

  31. Mark J. Kushner, "Introduction to the Session in Memory of Will Allis", 52nd Gaseous Electronics Conference, Norfolk, VA, October 1999. (654 kB)

  32. Rajesh Dorai and Mark J. Kushner, "Effects of Propene on the Remediation of NOx from Diesel Exhausts", Society of Automotive Engineers (SAE) Fall 1999 F&L Meeting, Toronto, Ontario, Canada, Oct. 1999. (480 kB)

  33. Xudong Xu and Mark J. Kushner, "PFC Abatement in Inductively Coupled Plasma Reactors using O2, H2O and H2O as Additive Gases", 46th Annual Symposium of the American Vacuum Society, Seattle, WA, Oct. 1999. (343 kB)

  34. Ronald L. Kinder and Mark J. Kushner, "Simulations of Low Field Helicon Discharges", 46th Annual Symposium of the American Vacuum Society, Seattle, WA, Oct. 1999. (772 kB)

  35. Da Zhang and Mark J. Kushner, "Investigation of Si and SiO2 Etch Mechanisms Using an Integrated Surface Kinetics Model", 46th Annual Symposium of the American Vacuum Society, Seattle, WA, Oct. 1999. (249 kB)

  36. Junqing Lu and Mark J. Kushner, "Sputter-Wind Heating in Ionized Metal PVD", 46th Annual Symposium of the American Vacuum Society, Seattle, WA, Oct. 1999. (241 kB)

  37. Mark J. Kushner and Shahid Rauf, "Real Time Control of Plasma Tools During Recipe Changes and Transients", 46th Annual Symposium of the American Vacuum Society, Seattle, WA, Oct. 1999. (957 kB)

  38. Mark J. Kushner, "Waves, Fluxes and Polymers: Plasma Equipment and Process Modeling for Microelectronics Fabrication", Michigan State University, Department of Electrical and Computer Engineering, East Lansing, MI, November 1999. (5.5 MB)

  39. Khaled Hassouni, Rajesh Dorai and Mark J. Kushner, "Consequences of Soot Particles on the Plasma Remediation of NOx in the Presence of Hydrocarbons", 27th IEEE Conference on Plasma Science, New Orleans, LA, June 2000. (789 kB)

  40. Da Zhang and Mark J. Kushner, "Surface and Gas Phase Reactions for Fluorocarbon Plasma Etching of SiO2", 27th IEEE Conference on Plasma Science, New Orleans, LA, June 2000. (503 kB)

  41. June Lu and Mark J. Kushner, "An Integrated Plasma Equipment-Feature Scale Model for Ionized Metal Physical Vapor Deposition", 27th IEEE Conference on Plasma Science, New Orleans, LA, June 2000. (234 kB)

  42. Ronald L. Kinder and Mark J. Kushner, "Heating Mechanisms and Wave Propagation in Magnetically Enhanced Inductively Coupled Plasmas", 27th IEEE Conference on Plasma Science, New Orleans, LA, June 2000. (848 kB)

  43. Mark J. Kushner, "Modeling of Collisional, Low Temperature Plasmas: Fundamentals and Applications", 27th IEEE Conference on Plasma Science, New Orleans, LA, June 2000. (2.9 MB)

  44. Mark J. Kushner,"Plasma Equipment Modeling for Process Design" 17th International VLSI Multilevel Interconnection Conference, Santa Clara, CA, June 2000.
    Viewgraph Presentation (1.6 MB)
    Proceedings (co-author: J. Lu) (170 kB)

  45. Mark J. Kushner, "Sustaining Another Decade of Innovation in Equipment and Process Design: Needs and Challenges", 47th Annual Symposium of the American Vacuum Society, Boston, MA, October 2000. (4.4 MB)

  46. June Lu and Mark J. Kushner, "Modeling of Trench Filling During Ionized Metal Physical Vapor Deposition", 47th Annual Symposium of the American Vacuum Society, Boston, MA, October 2000. (400 kB)

  47. Da Zhang, Chunshi Cui and Mark J. Kushner, "Reaction Mechanisms and SiO2 Profile Evolution in Fluorocarbon Plasmas", 47th Annual Symposium of the American Vacuum Society, Boston, MA, October 2000. (460 kB)

  48. Ron Kinder and Mark J. Kushner, "Electron Transport and Power Deposition in Magnetically Enhanced Inductively Coupled Plasmas", 47th Annual Symposium of the American Vacuum Society, Boston, MA, October 2000. (930 kB)

  49. Arvind Sankaran and Mark J. Kushner, " Harmonic Content of Electron Impact Source Functions in Inductively Coupled Plasmas Using an On-the-Fly Monte-Carlo Technique", 53rd Gaseous Electronics Conference, Houston, TX, October 2000 (580 kB)

  50. Rajesh Dorai, Khaled Hassouni and Mark J. Kushner, "Simultaneous Remediation of NOx and Oxidation of Soot Using Dielectric Barrier Discharges", 53rd Gaseous Electronics Conference, Houston, TX, October 2000 (240 kB)

  51. Pramod Subramonium and Mark J. Kushner, "Simulation of Transients in Plasma Processing Reactors Using Moderate Parallelism", 53rd Gaseous Electronics Conference, Houston, TX, October 2000 (900 kB)

  52. Ronald L. Kinder and Mark J. Kushner, "Electron Energy Distributions and Non-Collisional Heating in Magnetically Enhanced Inductively Coupled Plasmas", 53rd Gaseous Electronics Conference, Houston, TX, October 2000 (930 kB)

  53. Vivek Vyas and Mark J. Kushner, "Parametric Study of the Formation of Coulomb Crystals in the GEC Reference Cell", 9th Workshop on the Physics of Dusty Plasmas, Iowa City, IA, May 2001 (578 kB)

  54. Kapil Rajaraman and Mark J. Kushner, "A Monte Carlo Simulation of Radiation Trapping in Electrodeless Gas Discharges Having Complex Geometries", 28th IEEE Conference on Plasma Science, Las Vegas, NV, June 2001 (485 kB)

  55. Rajesh Dorai, Khaled Hassouni and Mark J. Kushner, "Effect of Radial Transport on the Plasma Remediation of Nitrogen-Oxides using Dielectric Barrier Discharges", 28th IEEE Conference on Plasma Science, Las Vegas, NV, June 2001 (280 kB)

  56. Pramod Subramonium and Mark J. Kushner, "2-Dimensional Modeling of Pulsed Plasmas With and Without Substrate Bias Using Moderate Parallelism", 28th IEEE Conference on Plasma Science, Las Vegas, NV, June 2001
    Presentation without animations (358k)
    Animations (4 MB) [NOTE! File contains animations. Save file to disk. Run file to unzip presentation files to new folder. See "README" file for instructions.]

  57. Brian Lay, Sang-Hoon Cho and Mark J. Kushner, "Starting Mechanisms for High Pressure Metal Halide Lamps" , 28th IEEE Conference on Plasma Science, Las Vegas, NV, June 2001 (2.8 MB)
    [NOTE! File contains animations. Save file to disk. Run file to unzip presentation files to new folder. See "README" file for instructions.]

  58. Timothy J. Sommerer, David Wharmby, J. Gary Eden, and Mark J. Kushner "Breakdown Processes in Metal Halide Lamps", 9th International Symposium on the Science and Technology of Light Sources (LS-9), Ithaca, NY, August 2001 (7.2 MB)
    [NOTE! File contains animations. Save file to disk. Run file to unzip presentation files to new folder. See "README" file for instructions.]

  59. Vivek Vyas and Mark J. Kushner "Formation of Coulomb Crystals Having Multiple Lattices", 54th Gaseous Electronics Conference, State College, PA, October 2001. (876 kB)
    [NOTE! File contains animations. Save file to disk. Run file to unzip presentation files to new folder. See "README" file for instructions.]

  60. Richard Moss and Mark J. Kushner "Modeling of Breakdown Processes in Cold and Warm Metal Halide Lamps", 54th Gaseous Electronics Conference, State College, PA, October 2001. (5.6 MB)
    [NOTE! File contains animations. Save file to disk. Run file to unzip presentation files to new folder. See "README" file for instructions.]

  61. Kapil Rajaraman, Graeme G. Lister and Mark J. Kushner, "A Monte Carlo Simulation of Radiation Trapping in Electrodeless Lamps: Complex Geometries and Isotope Effects", 54th Gaseous Electronics Conference, State College, PA, October 2001 (992 kB)

  62. Rajesh Dorai and Mark J. Kushner, "Plasma Remediation of NOx in the Presence of Hydrocarbons Using Dielectric Barrier Discharges: Microstreamer Discharge Dynamics", 54th Gaseous Electronics Conference, State College, PA, October 2001 (1128 kB)

  63. Ronald Kinder and Mark J. Kushner "A 3-Dimensional Model for Wave Propagation and Plasma Properties in Magnetically Enhanced ICP Reactors", 48th American Vacuum Society Annual Symposium, San Francisco, CA, October 2001. (3.9 MB)
    [NOTE! File contains animations. Save file to disk. Run file to unzip presentation files to new folder. See "README" file for instructions.]

  64. Arvind Sankaran and Mark J. Kushner "Time Dependent Electron Impact Source Functions in Inductive and Capacitive Plasma Sources Obtained Using an On-the-Fly Monte Carlo Technique", 48th American Vacuum Society Annual Symposium, San Francisco, CA, October 2001. (6.8 MB)
    [NOTE! File contains animations. Save file to disk. Run file to unzip presentation files to new folder. See "README" file for instructions.]

  65. Pramod Subramonium and Mark J. Kushner "Properties of Pulsed ICPs with rf Substrate Biases", 48th American Vacuum Society Annual Symposium, San Francisco, CA, October 2001. (3.2 MB)
    [NOTE! File contains animations. Save file to disk. Run file to unzip presentation files to new folder. See "README" file for instructions.]

  66. Pramod Subramonium and Mark J. Kushner "3-Dimensional Modeling of Asymmetric Gas Heating in Plasma Processing Reactors", 48th American Vacuum Society Annual Symposium, San Francisco, CA, October 2001. (3.4 MB)
    [NOTE! File contains animations. Save file to disk. Run file to unzip presentation files to new folder. See "README" file for instructions.]

  67. Rajesh Dorai, Khaled Hassouni and Mark J. Kushner "Effect of Multiple Pulses on the Heterogeneous and Homogeneous Chemistry During the Plasma Remediation of NOx and Oxidation of Soot using Dielectric Barrier Discharges", American Institute of Chemical Engineers Annual Meeting, Reno, NV November 2001. (887 kB)

  68. Pramod Subramonium and Mark J. Kushner "Modeling Studies of Pulsed Electronegative Plasmas: Chlorine and Fluorocarbon", American Institute of Chemical Engineers Annual Meeting, Reno, NV November 2001. (5.0 MB)
    [NOTE! File contains animations. Save file to disk. Run file to unzip presentation files to new folder. See "README" file for instructions.]

  69. Vivek Vyas and Mark J. Kushner "A Three-Dimensional Model to Study Dust Particle Transport in Plasma Processing Reactors", Sandia National Laboratories, March 2002. (2 MB)
    [NOTE! File contains animations. Save file to disk. Run file to unzip presentation files to new folder. See "README" file for instructions.]

  70. Pramod Subramonium and Mark J. Kushner "Consequences of Plasma Chemistry on the Uniformity of Neutral and Ion Temperatures in Inductively Coupled Plasmas", 29th International Conference on Plasma Science, Banff, Alberta, Canada, May 2002. (4.8 MB)
    [NOTE! File contains animations. Save file to disk. Run file to unzip presentation files to new folder. See "README" file for instructions.]

  71. Rajesh Dorai and Mark J. Kushner "Plasma Surface Modification of Polymers", 29th International Conference on Plasma Science, Banff, Alberta, Canada, May 2002. (2.2 MB)

  72. Kapil Rajaraman and Mark J. Kushner "Monte Carlo Simulation of Radiation Trapping in Electrodeless Lamps: A Study of Collisional Broadeners", 29th International Conference on Plasma Science, Banff, Alberta, Canada, May 2002. (1.5 MB)

  73. Alex Vasenkov and Mark J. Kushner "Influence of Electron-Electron Collisions on Electron Energy Distributions and Transport in Inductively Coupled Plasmas", 29th International Conference on Plasma Science, Banff, Alberta, Canada, May 2002. (956 kB)

  74. Alex Vasenkov, Arvind Sankaran and Mark J. Kushner "Harmonic Content of Electron Energy Distributions and Excitation Rates", 29th International Conference on Plasma Science, Banff, Alberta, Canada, May 2002. (17 MB)
    [NOTE! File contains animations. Save file to disk. Run file to unzip presentation files to new folder. See "README" file for instructions.]

  75. Richard Moss, Scott McCain, J. Gary Eden and Mark J. Kushner, "Consequences of Geometry and Pressure on Breakdown in High Pressure Lamps ", 29th International Conference on Plasma Science, Banff, Alberta, Canada, May 2002. (17 MB)
    [NOTE! File contains animations. Save file to disk. Run file to unzip presentation files to new folder. See "README" file for instructions.]

  76. Arvind Sankaran, Alex Vasenkov and Mark J. Kushner, "Fluorocarbon Etching of Porous Silicon Dioxide: Plasma Chemistry and Surface Kinetics ", Advanced Metallization Conference, San Diego, CA, October 2002. (2.4 MB)

  77. Alex V. Vasenkov, Gottlieb S. Oehrlein and Mark J. Kushner, " Modeling of Electron Kinetics in Magnetically Enhanced Inductively Coupled Plasmas ", 55th Gaseous Electronics Conference, Minneapolis, MN, October 2002. (4.1 MB)

  78. Kapil Rajaraman, Alex V. Vasenkov and Mark J. Kushner, " Consequences of Radiation Trapping on Electron Energy Distributions in Low Pressure Inductively Coupled Hg/Ar Discharges ", 55th Gaseous Electronics Conference, Minneapolis, MN, October 2002. (1.2 MB)

  79. Alex V. Vasenkov and Mark J. Kushner, " Characteristics of Magnetically Enhanced Capacitively Coupled Discharges ", 55th Gaseous Electronics Conference, Minneapolis, MN, October 2002. (960 kB)

  80. Carole Maurice, Jaap Feijen, Mark J. Kushner and Gerrit Kroesen " Inductively Coupled Plasmas: One Big Presheath? ", 55th Gaseous Electronics Conference, Minneapolis, MN, October 2002. (595 kB)

  81. Richard Moss, Ananth Bhoj and Mark J. Kushner " Breakdown Properties of Cold Metal Halide Lamps ", 55th Gaseous Electronics Conference, Minneapolis, MN, October 2002. (3.6 MB)
    [NOTE! File contains .pdf file of presentation and .avi files of animations. Save file to disk. Run file to unzip presentation files to new folder. Where indicated in the .pdf file, execute the .avi files to view animations.]

  82. Arvind Sankaran and Mark J. Kushner " Profile Evolution During Fluorocarbon Etching of Low-k Porous Silica ", 49th International Symposium of the American Vacuum Society, Denver, CO, November 2002. (2 MB)
    [NOTE! File contains .pdf file of presentation and .avi files of animations. Save file to disk. Run file to unzip presentation files to new folder. Where indicated in the .pdf file, execute the .avi files to view animations.]

  83. Vivek Vyas and Mark J. Kushner " Coulomb Crystals in Plasma Processing Reactors ", 49th International Symposium of the American Vacuum Society, Denver, CO, November 2002. (1.1 MB)
    [NOTE! File contains .pdf file of presentation and .avi files of animations. Save file to disk. Run file to unzip presentation files to new folder. Where indicated in the .pdf file, execute the .avi files to view animations.]

  84. Rajesh Dorai and Mark J. Kushner " Atmospheric Pressure Plasma Processing of Polypropylene ", 49th International Symposium of the American Vacuum Society, Denver, CO, November 2002. (400 kB)

  85. Alex Vasenkov, Gottlieb Oehrlein and Mark J. Kushner, " Characteristics of c-C4F8, c-C4F8/Ar, O2 Inductively Coupled Plasmas for Dielectric Etching ", 49th International Symposium of the American Vacuum Society, Denver, CO, November 2002. (1.4 MB)

  86. Mark J. Kushner, " Plasma Processing and Polymers: Frito Bags to Microelectronics Fabrication ", Symposium, Chemical Engineering Department, University of Texas at Austin, Austin, TX, November 2002. (3.7 MB)

  87. Mark J. Kushner, " Modeling of Integrated Plasma Processing: Plasma Physics, Plasma Chemistry and Surface Kinetics ", CFD Research Corp. Annual Users Meeting, Huntsville, AL, May 2003.

    PowerPoint Presentation with Animations (26 MB)

    PDF File without Animations (4.9 MB)

  88. Mark J. Kushner, " Sources of Nonequilibrium in Plasma Processing ", 16th International Symposium on Plasma Chemistry, Toramina, Sicily, July 2003

    PowerPoint Presentation with Animations (19.7 MB)

    PDF File without Animations (3.4 MB)

  89. Pramod Subramonium and Mark J. Kushner, " Consequences of Long Term Transients in Large Area High Density Plasma Processing: A 3-Dimensional Computational Investigation ", 16th International Symposium on Plasma Chemistry, Toramina, Sicily, July 2003

    PowerPoint Presentation with Animations (8.6 MB)

    PDF File without Animations (770 kB)

  90. Arvind Sankaran and Mark J. Kushner, " Etching and Post Etching Processes of Porous and Conventional SiO2 in Fluorocarbon Based Chemistries ", 16th International Symposium on Plasma Chemistry, Toramina, Sicily, July 2003 (500 kB)

  91. Mark J. Kushner, " Scaling of Microdischarge Devices: Pyramidal Structures ", 56th Gaseous Electronics Conference, San Francisco, CA, October 2003 (1.3 MB)

  92. Alex V. Vasenkov and Mark J. Kushner, " Angular Dependence of Electron Velocity Distributions in Low-pressure Inductively Coupled Plasmas ", 56th Gaseous Electronics Conference, San Francisco, CA, October 2003 (1.1 MB)

  93. Kapil Rajaraman and Mark J. Kushner, " Radiation Trapping in Electrodeless Lamps: Complex Geometries and Operating Conditions ", 56th Gaseous Electronics Conference, San Francisco, CA, October 2003 (720 kB)

  94. D. Shane Stafford and Mark J. Kushner, " Simulation of O2(1-delta) Yields in Mixtures of O2 and Inert Gases in Low Pressure Plasmas ", 56th Gaseous Electronics Conference, San Francisco, CA, October 2003 (2.0 MB)

  95. Ananth Bhoj, Gang Luo and Mark J. Kushner, " Plasma Dynamics and Thermal Effects During Startup of Metal Halide Lamps ", 56th Gaseous Electronics Conference, San Francisco, CA, October 2003 (2.8 MB)

  96. Vivek Vyas and Mark J. Kushner, " Non-equilibrium Ion and Neutral Transport in Low-Pressure Plasma Processing Reactors ", 56th Gaseous Electronics Conference, San Francisco, CA, October 2003 (800kb)

  97. Pramod Subramonium and Mark J. Kushner, " 3-Dimensional Modeling of Pulsed Inductively Coupled Plasmas: A Method to Improve Uniformity ", 50th International Symposium of the American Vacuum Society, Baltimore, MD, November 2003. (510 kB)

  98. Arvind Sankaran and Mark J. Kushner, " Integrated Modeling of Etching, Cleaning and Barrier Coating PVD for Porous and Conventional SiO2 in Fluorocarbon Based Chemistries ", 50th International Symposium of the American Vacuum Society, Baltimore, MD, November 2003. (1.9 MB)

  99. Alex Vasenkov, Gottlieb Oehrlein and Mark J. Kushner, " A Computational Investigation of the Plasma Chemistry of Ar/c-C4F8/O2/CO in Magnetically Enhanced Discharges ", 50th International Symposium of the American Vacuum Society, Baltimore, MD, November 2003. (2.1 MB)

  100. Mark J. Kushner, " Continuity in Plasma Processing: Yesterday's Accomplishments, Today's Innovation's, Tomorrow's Challenges ", 50th International Symposium of the American Vacuum Society, Baltimore, MD, November 2003.

    Entire Presentation (without animations) (PDF file, 5.0 MB)

    2-Slides containing animations (Powerpoint file, 2.1 MB)

  101. Mark J. Kushner, " Optimizing Plasma Processing from $0.05/m2 to $1000/cm2 ", 13th Gaseous Electronics Meeting, Murramarang, Batemans Bay, NSW, Australia, February 2004

    Entire Presentation (without animations) (PDF file, 6.2 MB)

    Slides containing animations (Powerpoint file, 2.8 MB)

  102. D. Shane Stafford, June Lu, Ramesh Arakoni and Mark J. Kushner " Scaling of Electrically Excited Chemical Oxygen Iodine Lasers ", Workshop on Electrically Excited Coil Lasers, Air Force Research Labs, Albuquerque, NM, May 2004 (1.8MB)

  103. D. Shane Stafford and Mark J. Kushner, " Scaling of Plasma Sources for O2(1-delta) Generation for Chemical Oxygen-Iodine Lasers ", 31st International Conference on Plasma Science, Baltimore, MD, June 2004 (1.0 MB)

  104. Ramesh Arakoni and Mark J. Kushner, " Plasma Sources for Microthrusters ", 31st International Conference on Plasma Science, Baltimore, MD, June 2004 (641kB)

  105. D. Shane Stafford and Mark J. Kushner, " Investigation of Axially Flowing He/O2 Plasmas for Oxygen-Iodine Lasers ", 57th Gaseous Electronics Conference, Bunratty, Ireland, September 2004 (551kb)

  106. Ramesh Arakoni and Mark J. Kushner, " Microdischarges as Sources of Photons, Radicals and Thrust ", 57th Gaseous Electronics Conference, Bunratty, Ireland, September 2004 (1.8MB)

  107. Ananth Bhoj and Mark J. Kushner " Multiscale Modeling of Treatment of Polymer Films Using Atmospheric Pressure Pulsed Coronas ", 57th Gaseous Electronics Conference, Bunratty, Ireland, September 2004 (2.6 MB)
    [NOTE! File contains .ppt file of presentation and .avi files of animations. Save file to disk. Run file to unzip presentation files to new folder. Powerpoint and avi files must be in the same directory. Where indicated in the .ppt file, click on the image to view the avi animations.]

  108. Ankur Agarwal and Mark J. Kushner, " Computational Investigation of Pulsed Plasma Doping ", Varian Semiconductor Equipment Associates, October 2004 (68.6 MB)

  109. Mark J. Kushner, " Modeling of Microdischarge Devices: Plasma and Gas Dynamics ", 2nd International Workshop on Micodischarges, Jersey City, NJ, October 2004 (5.3MB)

  110. Mark J. Kushner, " Applications of Low Temperature Plasmas: Status, Scientific Issues and Opportunities ", 12th International Conference on Plasma Physics, Nice, France, October 2004

    Entire Presentation (without animations) (PDF file, 6.9 MB)

    Slides containing animations (Powerpoint file, 3.5 MB)

  111. Vivek Vyas and Mark J. Kushner, " Scaling of Low Pressure Ionized Metal PVD Reactors ", 51st International Symposium of the American Vacuum Society, Anaheim, CA, November 2004 (1.6 MB)

  112. Junqing Lu and Mark J. Kushner, " Control of Uniformity in Capacitively Coupled Plasmas Considering Edge Effects ", 51st International Symposium of the American Vacuum Society, Anaheim, CA, November 2004 (1.2 MB)

  113. Kapil Rajaraman and Mark J. Kushner, " Deposition and Composition of Polymer Films in Fluorocarbon Plasmas ", 51st International Symposium of the American Vacuum Society, Anaheim, CA, November 2004 (950 kB)

  114. Ankur Agarwal and Mark J. Kushner, " Effect of Bias Voltage Waveforms on Ion Energy Distributions and Fluorocarbon Plasma Etch Selectivity ", 51st International Symposium of the American Vacuum Society, Anaheim, CA, November 2004

    Entire Presentation (without animations) (PDF file, 1.2 MB)

    Slides containing animations (Powerpoint file, 5.3 MB)

  115. Mark J. Kushner, " Plasma Material Processing: Creating High Value ", Chemical Engineering Departmental Seminar, Iowa State University, January 2005. (24.3 MB)

  116. Mark J. Kushner, " New Opportunities in Plasma Surface Interactions for Functionalization of Surfaces ", Annual Meeting of the Division of Atomic, Molecular and Optical Physics, American Physical Society, Lincoln, Nebraska, May 2005. (8.2 MB)

  117. Ankur Agarwal and Mark J. Kushner, " Characteristics of Pulsed Plasma Doping Sources for Ultra Shallow Junction Formation ", 32nd International Conference on Plasma Science, Monterey, CA, June 2005. (38.4 MB)
    [NOTE! File contains .ppt file of presentation and .avi files of animations. Save file to disk. Run file to unzip presentation files to new folder. Powerpoint and avi files must be in the same directory. Where indicated in the .ppt file, click on the image to view the avi animations.]

  118. Ananth Bhoj and Mark J. Kushner, " Multiscale Simulation of Functionalization of Surfaces using Atmospheric Pressure Discharges ", 32nd International Conference on Plasma Science, Monterey, CA, June 2005. (4.6 MB)

  119. Ramesh Arakoni, J. J. Ewing and Mark J. Kushner, " Modeling of Microdischarges for Use as Microthrusters ", 32nd International Conference on Plasma Science, Monterey, CA, June 2005. (7.9 MB)

  120. Natalia Yu Babaeva and Mark J. Kushner, " Streamer Dynamics in a Media Containing Dust Particles ", 32nd International Conference on Plasma Science, Monterey, CA, June 2005. (10.2 MB)
    [NOTE! File contains .ppt file of presentation and .avi files of animations. Save file to disk. Run file to unzip presentation files to new folder. Powerpoint and avi files must be in the same directory. Where indicated in the .ppt file, click on the image to view the avi animations.]

  121. Natalia Yu Babaeva, Mark J. Kushner and J. K. Lee, " Asymmeric Capacitively Coupled Plasma Sources with Clean and Contaminated Electrodes ", 32nd International Conference on Plasma Science, Monterey, CA, June 2005. (3.8 MB)
    [NOTE! File contains .ppt file of presentation and .avi files of animations. Save file to disk. Run file to unzip presentation files to new folder. Powerpoint and avi files must be in the same directory. Where indicated in the .ppt file, click on the image to view the avi animations.]

  122. Anath Bhoj, Natalia Yu Babaeva, Ramesh Arakoni and Mark J. Kushner, " Plasmas in (and around) Small Places ", International Conference on Phenomena in Ionized Gases, Veldhoven, The Netherlands, July 2005.
    Proceedings
    Presentation (15.6 MB) [NOTE! File contains .ppt file of presentation and .avi files of animations. Save file to disk. Run file to unzip presentation files to new folder. Powerpoint and avi files must be in the same directory. Where indicated in the .ppt file, click on the image to view the avi animations.]

  123. Natalia Yu Babaeva and Mark J. Kushner, " Streamer Dynamics in Gases Containing Dust Particles ", International Conference on Phenomena in Ionized Gases, Veldhoven, The Netherlands, July 2005.
    Proceedings
    Presentation (10.6 MB)

  124. Natalia Yu Babaeva, J. K. Lee and Mark J. Kushner, " Characteristics of Asymmetric Capacitively Coupled Plasma Sources Operating with Clean and Contaminated Electrodes ", 17th International Symposium on Plasma Chemistry, Toronto, Canada, August 2005 (754 kB)

  125. Natalia Yu Babaeva, Ramesh Arakoni and Mark J. Kushner, " Excitation of O2(1-delta) in Pulsed Radio Frequency Flowing Plasmas for Chemical Oxygen Iodine Lasers ", 58th Gaseous Electronics Conference, San Jose, CA, October 2005 (1.9 MB)

  126. Mark J. Kushner and Yang Yang " Magnetically Enhanced Multiple Frequency Capacitively Coupled Plasmas: Dynamics and Strategies ", 58th Gaseous Electronics Conference, San Jose, CA, October 2005 (9.9 MB)

  127. Ankur Agarwal and Mark J. Kushner, " A Computational Investigation of Plasma Doping ", TECHCON'05, Semiconductor Research Corp., Portland, OR, October 2005
    Proceedings
    Presentation (27.2 MB)

  128. Ramaesh Arakoni, J. J. Ewing and Mark J. Kushner, " Modeling of Microdischarges for Use as Microthrusters ", 52nd International Symposium of the American Vacuum Society, Boston, MA, November 2005
    Without Animations (3.4 MB PDF)
    With Animations (14.2 MB Powerpoint)

  129. Ananth N. Bhoj and Mark J. Kushner, " Functionalization of Rough Surfaces and Porous Micron-Sized Polymer Sized Beads Using Atmospheric Pressure Plasmas ", 52nd International Symposium of the American Vacuum Society, Boston, MA, November 2005 (1.5 MB)

  130. Ankur Agarwal and Mark J. Kushner, " Effect of Reactor Geometry on Ion Energy Distributions for Pulsed Plasma Doping (P2LAD) ", 52nd International Symposium of the American Vacuum Society, Boston, MA, November 2005
    Without Animations (1 MB PDF)
    With Animations (36.5 MB Powerpoint)

  131. Ananth N. Bhoj, Natalia Babaeva and Mark J. Kushner, " Functionalization of Surfaces by Plasmas at Low and High Pressure ", 6th International Conference on Reactive Plasmas and 23rd Symposium on Plasma Processing, Sendai, Japan, January 2006
    Without Animations (2 MB PDF)
    With Animations (7.7 MB Powerpoint)
    Proceedings (2 MB PDF)

  132. Mark J. Kushner, " Making Plasmas Do Small Things: Functionalizing Nooks-and-Crannies in Polymers at Low and High Pressure ", Symposium, Department of Chemical Biomolecular Engineering, University of California at Los Angeles, April 2006
    With Animations (12.6 MB Powerpoint)
    Without Animations (2.5 MB PDF)

  133. A. Agarwal and M. J. Kushner, " Plasma Atomic Layer Etching ", 33rd International Conference on Plasma Science, Traverse City, MI, June 2006 (6.1 MB Powerpoint)

  134. R. A. Arakoni, A. N. Bhoj and M. J. Kushner, " Hydrogen Production in Ar/NH3 Microdischarges ", 33rd International Conference on Plasma Science, Traverse City, MI, June 2006 (6.5 MB Powerpoint)

  135. N. Yu. Babaeva, R. A. Arakoni and M. J. Kushner, " Optimization of O2(1-delta ) Yields in Pulsed RF Flowing Plasmas For chemical Oxygen Iodine Lasers ", 33rd International Conference on Plasma Science, Traverse City, MI, June 2006 (5.7 MB Powerpoint)

  136. R. A. Arakoni, J. J. Ewing and M. J. Kushner, " Optimizing the Performance of Plasma Based Microthrusters ", 33rd International Conference on Plasma Science, Traverse City, MI, June 2006 (6.8 MB Powerpoint)

  137. N. Yu. Babaeva and M. J. Kushner, " Wafer Edge Effects Considering Ion Inertia in Capacitively Coupled Discharges ", 33rd International Conference on Plasma Science, Traverse City, MI, June 2006 (5.5 MB Powerpoint)

  138. A. N. Bhoj and M. J. Kushner, " Radical Generation and Surface Functionalization of Polymers in Flowing Atmospheric Pressure Pulsed Discharges ", 33rd International Conference on Plasma Science, Traverse City, MI, June 2006 (3.3 MB Powerpoint)

  139. R. Arakoni, A. N. Bhoj and M. J. Kushner, " Optimization of H2 Production in Ar/NH3 Microdischarges ", 59th Gaseous Electronics Conference, Columbus, OH, October 2006 (3.5 MB PDF)

  140. R. Arakoni, Natalia Y. Babaeva and M. J. Kushner, " O2(1-delta) Production and Oxygen-Iodine Kinetics in Flowing Afterglows for Electrically Excited Chemical-Oxygen-Iodine Lasers ", 59th Gaseous Electronics Conference, Columbus, OH, October 2006 (1.5 MB PDF)

  141. A. N. Bhoj and M. J. Kushner, " Plasma Dynamics at the Ionization Front of High Pressure Discharges Using Electron Monte Carlo Simulations on an Adaptive Mesh ", 59th Gaseous Electronics Conference, Columbus, OH, October 2006 (12.9 MB PowerPoint)

  142. Yang Yang and Mark J. Kushner, " Scaling of Dual Frequency Capacitively Coupled Plasma Etching Tools Approaching and Exceeding 100 MHz ", 53rd International Symposium of the American Vacuum Society, San Francisco, CA, November 2006
    With Animations (6.6 MB Powerpoint)
    Without Animations (10.6 MB PDF)

  143. Natalia Y. Babaeva and Mark J. Kushner, " Edge Effects in Reactive Ion Etching: The Wafer-Focus Ring Gap ", 53rd International Symposium of the American Vacuum Society, San Francisco, CA, November 2006
    With Animations (6.0 MB Powerpoint)
    Without Animations (1.5 MB PDF)

  144. Ankur Agarwal and Mark J. Kushner, " Plasma Atomic Layer Etching Using Conventional Plasma Equipment ", 53rd International Symposium of the American Vacuum Society, San Francisco, CA, November 2006
    With Animations (7.4 MB Powerpoint)
    Without Animations (6.7 MB PDF)

  145. Ankur Agarwal and M. J. Kushner, " Modeling of Seasoning of Reactors: Effects of Ion Energy Distributions to Chamber Walls ", 53rd International Symposium of the American Vacuum Society, San Francisco, CA, November 2006 (2.4 MB PDF)

  146. Mark J. Kushner, " Plasma Surface Interactions for Atmospheric Pressure Functionalization of Polymers ", EU-Japan Joint Symposium on Plasma Processing, Belgrade, Serbia, March 2007 (9.0 MB PowerPoint)

  147. Natalia Y. Babaeva, Ramesh A. Arakoni and Mark J. Kushner, " O2(1-delta) Production in High Pressure Flowing He/O2 Plasmas: Scaling and Quenching ", 34th International Conference on Plasma Science, Albuquerque, NM June 2007 (1.4 MB PDF)

  148. Ramesh A. Arakoni, Natalia Y. Babaeva and Mark J. Kushner, " O2(1-delta) and I(2-P-1/2) Production in Flowing Afterglows for Oxygen-Iodine Lasers: Effect of NO/NO2 Additives ", 34th International Conference on Plasma Science, Albuquerque, NM June 2007 (1.9 MB PDF)

  149. Ankur Agarwal and Mark J. Kushner, " Recipes for Atomic Layer Etching ", 34th International Conference on Plasma Science, Albuquerque, NM June 2007 (5.0 MB Powerpoint)

  150. Mark J. Kushner, " The Role of Modeling of Non-equilibrium Plasmas: Scientific Curiosity or Industrial Tool? ", 18th International Symposium on Plasma Chemistry, Kyoto, Japan, August, 2007 (18.8 MB PowerPoint)

  151. M. Wang, A. Agarwal, Y. Yang and M. J. Kushner, " Plasma Etching of Extremely High Aspect Ratio Features: Twisting Effects ", 60th Gaseous Electronics Conference, Washington, DC, October, 2007 (12.6 MB Powerpoint)

  152. A. Agarwal and Mark J. Kushner, " Seasoning of Reactors: Feedback Control Strategies to Counter Wafer-to-Wafer Drifts ", 60th Gaseous Electronics Conference, Washington, DC, October, 2007 (0.7 MB PDF)

  153. N. Y. Babaeva, L. A. Garcia, R. A. Arakoni and M. J. Kushner " Plasma Excited Chemical-Oxygen-Iodine Lasers: Optimizing Injection and Mixing for Positive Gain ", 60th Gaseous Electronics Conference, Washington, DC, October, 2007 (1.5 MB PDF)

  154. N. Y. Babaeva and Mark J. Kushner, " Ion Energy and Angular Distributions into Small Features in Plasma Etching Reactors: The Wafer-Focus Ring Gap ", 54th International Symposium of the American Vacuum Society, Seattle, WA, October 2007 (9.2 MB Powerpoint)

  155. A. Agarwal and Mark J. Kushner, " Real-Time and Wafer-to-Wafer Control Strategies to Address Seasoning of Plasma Etching Reactors ", 54th International Symposium of the American Vacuum Society, Seattle, WA, October 2007 (1.1 MB PDF)

  156. Y. Yang and Mark J. Kushner, " Numerical Investigation of Wave Effects in High-Frequency Capacitively Coupled Plasmas ", 54th International Symposium of the American Vacuum Society, Seattle, WA, October 2007 (4.2 MB PowerPoint)

20 October 2007
ODP Webmaster