IOWA STATE UNIVERSITY

DEPARTMENT OF ELECTRICAL AND COMPUTER ENGINEERING

The Computational Optical and Discharge Physics Group (CODPG) in the Department of Electrical and Computer Engineering is housed in Durham Center on the campus of the Iowa State University. The CODPG, which is directed by Prof. Mark J. Kushner, develops computer simulations of low temperature plasmas and technologically important devices which use low temperature plasmas. These simulations are used as both a method of investigating the basic physical processes which occur in low temperature plasmas, and as Computer Aided Design (CAD) tools for the design of plasma equipment. Some of the applications for which the CODPG has recently developed simulations and CAD tools are:

• Plasma etching and deposition for fabrication of microelectronics and flat panel displays
• Plasma etch and deposition surface kinetics and profile models
• Lasers
• Pulse power switches
• Plasma remediation of toxic gases
• Lighting sources
• Plasma display panels
• Nanocrystal generation for fabrication of nanophase materials
• "Dusty Plasmas" (nucleation, growth and transport of particles in plasmas)
• Contamination Free Manufacturing

The current emphasis of the CODPG is development of 2- and 3-dimensional computer models for plasma materials processing, and plasma remediation of toxic gases. The CODPG is well known in the microelectronics fabrication industry for its innovative simulations and visualizations of plasma processing reactors, and for its close working relationships with the industry and with national laboratories. Many of the computer models and CAD tools developed by the CODPG are available for licensing and transfer to industry. In particular the Hybrid Plasma Equipment Model (HPEM) is now in use by semiconductor equipment suppliers and chip manufacturers. The CODPG maintains its own computing facility of high speed workstations and moderately parallel minicomputers in its laboratory at the University of Illinois.

Overviews, conference presentations, theses and articles from the CODPG are available for viewing and downloading. Many of these offerings are pdf files which require a viewer or plug-in for your browser. You can obtain the Adobe Acrobat Reader viewer and plug-in from .

• CODPG Overview
• Hybrid Plasma Equipment Model (HPEM)
• Projects
• Publications
• Recent Theses
• Recent Presentations
• Electron Impact and Heavy Particle Databases
• Overview of the Electrical and Computer Engineering Department at the University of Illinois

For more information on the availability of graduating students who are experts in computer simulation, as well as CAD tools and computer models for low temperature plasmas, contact Prof. Mark J. Kushner.

For classes being taught by Prof. Kushner, see: classes.